Omron has introduced a new non-contact temperature sensor at the 37th International Welfare Machine Show, which is the latest in its kind. Due to the adoption of MEMS technology, the sensor element is reduced to 150 micron and the sensor elements are arranged in a 16*16 array. The chip size is only 6mm square, it is said that "the industry's smallest level", the sensitivity mentioned to the original 7 times.
Omron said that the non-contact temperature sensor has the characteristics that the camera and the pyroelectric sensor do not have, that is, it has strong adaptability to the lighting environment and can sense people in a static state. However, due to its low sensitivity, the sensing area needs to be reduced. Therefore, to perform detection in a large space, a mechanism for driving a non-contact temperature sensor and a plurality of sensors need to be installed, so it has not been popularized at present.
With ordinary non-contact temperature sensor elements, many infrared rays penetrate through the infrared absorption film and thus have low sensitivity. This time, we have developed a micromirror that allows infrared rays to converge to the infrared absorption film by adopting light wave control technology developed during the development of liquid crystal backlights. When developing such micromirrors, researchers created free-form surfaces on silicon wafers that had previously been difficult to form. Since the micromirrors can be formed on the silicon wafer, the sensor element and the lens can be vacuum-bonded at the wafer level, thereby reducing the amount of heat released into the air, thereby increasing the sensitivity. The sensitivity can be increased up to 7 times without changing the response speed. In this way, the sensing area can be expanded up to 7 times. According to the company's introduction, the sensitivity of the chip is 350V/W, and the response speed is about 3ms.
After the sensing area has been expanded to 7 times, the congestion of the crowd can be detected in real time in shops, stations and other places. The non-contact temperature sensor can be used for air conditioning control purposes, and it can also be used to detect intrusion at night, etc. use. Omron said that in the future, it will promote the MEMS non-contact temperature sensor products, by connecting it to the sensor network and other measures.
Omron said that the non-contact temperature sensor has the characteristics that the camera and the pyroelectric sensor do not have, that is, it has strong adaptability to the lighting environment and can sense people in a static state. However, due to its low sensitivity, the sensing area needs to be reduced. Therefore, to perform detection in a large space, a mechanism for driving a non-contact temperature sensor and a plurality of sensors need to be installed, so it has not been popularized at present.
With ordinary non-contact temperature sensor elements, many infrared rays penetrate through the infrared absorption film and thus have low sensitivity. This time, we have developed a micromirror that allows infrared rays to converge to the infrared absorption film by adopting light wave control technology developed during the development of liquid crystal backlights. When developing such micromirrors, researchers created free-form surfaces on silicon wafers that had previously been difficult to form. Since the micromirrors can be formed on the silicon wafer, the sensor element and the lens can be vacuum-bonded at the wafer level, thereby reducing the amount of heat released into the air, thereby increasing the sensitivity. The sensitivity can be increased up to 7 times without changing the response speed. In this way, the sensing area can be expanded up to 7 times. According to the company's introduction, the sensitivity of the chip is 350V/W, and the response speed is about 3ms.
After the sensing area has been expanded to 7 times, the congestion of the crowd can be detected in real time in shops, stations and other places. The non-contact temperature sensor can be used for air conditioning control purposes, and it can also be used to detect intrusion at night, etc. use. Omron said that in the future, it will promote the MEMS non-contact temperature sensor products, by connecting it to the sensor network and other measures.
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